WordNet sense 1 (the supernatural being conceived as the perfect and omnipotent and omniscient originator and ruler of the universe; the object of worship in monotheistic religions):

Supreme Being

WordNet sense 2 (any supernatural being worshipped as controlling some part of the world or some aspect of life or who is the personification of a force):

deity, divinity, immortal

WordNet sense 3 (a material effigy that is worshipped):

idol, graven image